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%MOMM*%
%LPD*%
G01*
G04 APERTURE LIST*
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G04 APERTURE END LIST*
D10*
G04 #@! TO.C,RD52*
X160155000Y-64391000D02*
X160155000Y-68391000D01*
G04 #@! TO.C,RD51*
X155710000Y-68518000D02*
X155710000Y-64518000D01*
G04 #@! TO.C,RD9*
X166854000Y-73630000D02*
X162854000Y-73630000D01*
G04 #@! TO.C,RP2*
X109609000Y-88632000D02*
X109609000Y-90632000D01*
D11*
G04 #@! TO.C,GPDI1*
X150296000Y-71062000D02*
X150046000Y-70812000D01*
X150046000Y-70812000D02*
X150296000Y-70562000D01*
X150296000Y-70562000D02*
X150296000Y-71062000D01*
D10*
G04 #@! TO.C,RP1*
X152281000Y-96361000D02*
X152281000Y-98361000D01*
G04 #@! TO.C,RP3*
X149472000Y-77311000D02*
X149472000Y-79311000D01*
G04 #@! TD*
D12*
G04 #@! TO.C,RD52*
X160155000Y-68391000D03*
X160155000Y-64391000D03*
G04 #@! TD*
G04 #@! TO.C,RD51*
X155710000Y-64518000D03*
X155710000Y-68518000D03*
G04 #@! TD*
D13*
G04 #@! TO.C,RD9*
X162854000Y-73630000D03*
X166854000Y-73630000D03*
G04 #@! TD*
D14*
G04 #@! TO.C,RP2*
X109609000Y-90599500D03*
X109609000Y-88664500D03*
G04 #@! TD*
D15*
G04 #@! TO.C,BAT1*
X172485000Y-105870000D03*
X156685000Y-105870000D03*
G04 #@! TD*
D16*
G04 #@! TO.C,U11*
X141980000Y-67706500D03*
D17*
X141980000Y-66436500D03*
X141980000Y-65166500D03*
X141980000Y-63896500D03*
X147380000Y-63896500D03*
X147380000Y-65166500D03*
X147380000Y-66436500D03*
X147380000Y-67706500D03*
G04 #@! TD*
D18*
G04 #@! TO.C,U10*
X116340000Y-82520000D03*
D19*
X117610000Y-82520000D03*
X118880000Y-82520000D03*
X120150000Y-82520000D03*
X120150000Y-89124000D03*
X118880000Y-89124000D03*
X117610000Y-89124000D03*
X116340000Y-89124000D03*
G04 #@! TD*
D20*
G04 #@! TO.C,U7*
X175395000Y-96015000D03*
D21*
X174125000Y-96015000D03*
X172855000Y-96015000D03*
X171585000Y-96015000D03*
X171585000Y-90615000D03*
X172855000Y-90615000D03*
X174125000Y-90615000D03*
X175395000Y-90615000D03*
G04 #@! TD*
D22*
G04 #@! TO.C,U6*
X129935000Y-104215000D03*
X129935000Y-104865000D03*
X129935000Y-105515000D03*
X129935000Y-106165000D03*
X129935000Y-106815000D03*
X129935000Y-107465000D03*
X129935000Y-108115000D03*
X129935000Y-108765000D03*
X129935000Y-109415000D03*
X129935000Y-110065000D03*
X135735000Y-110065000D03*
X135735000Y-109415000D03*
X135735000Y-108765000D03*
X135735000Y-108115000D03*
X135735000Y-107465000D03*
X135735000Y-106815000D03*
X135735000Y-106165000D03*
X135735000Y-105515000D03*
X135735000Y-104865000D03*
X135735000Y-104215000D03*
G04 #@! TD*
D23*
G04 #@! TO.C,U5*
X157285000Y-77392000D03*
X158235000Y-77392000D03*
X159185000Y-77392000D03*
X159185000Y-79992000D03*
X157285000Y-79992000D03*
G04 #@! TD*
G04 #@! TO.C,U3*
X159825000Y-90600000D03*
X160775000Y-90600000D03*
X161725000Y-90600000D03*
X161725000Y-93200000D03*
X159825000Y-93200000D03*
G04 #@! TD*
G04 #@! TO.C,U4*
X104575000Y-86215000D03*
X103625000Y-86215000D03*
X102675000Y-86215000D03*
X102675000Y-83615000D03*
X104575000Y-83615000D03*
G04 #@! TD*
D24*
G04 #@! TO.C,U9*
X126230000Y-111000000D03*
X126230000Y-109730000D03*
X126230000Y-108460000D03*
X126230000Y-107190000D03*
X126230000Y-105920000D03*
X126230000Y-104650000D03*
X126230000Y-103380000D03*
X126230000Y-102110000D03*
X126230000Y-100840000D03*
X126230000Y-99570000D03*
X126230000Y-98300000D03*
X126230000Y-97030000D03*
X126230000Y-95760000D03*
X126230000Y-94490000D03*
D25*
X122945000Y-93000000D03*
X121675000Y-93000000D03*
X120405000Y-93000000D03*
X119135000Y-93000000D03*
X117865000Y-93000000D03*
X116595000Y-93000000D03*
X115325000Y-93000000D03*
X114055000Y-93000000D03*
X112785000Y-93000000D03*
X111515000Y-93000000D03*
D24*
X108230000Y-94490000D03*
X108230000Y-95760000D03*
X108230000Y-97030000D03*
X108230000Y-98300000D03*
X108230000Y-99570000D03*
X108230000Y-100840000D03*
X108230000Y-102110000D03*
X108230000Y-103380000D03*
X108230000Y-104650000D03*
X108230000Y-105920000D03*
X108230000Y-107190000D03*
X108230000Y-108460000D03*
X108230000Y-109730000D03*
X108230000Y-111000000D03*
D26*
X116930000Y-103300000D03*
G04 #@! TD*
D27*
G04 #@! TO.C,Y2*
X178576000Y-98522000D03*
X172976000Y-98522000D03*
X172976000Y-101322000D03*
X178576000Y-101322000D03*
G04 #@! TD*
D28*
G04 #@! TO.C,C47*
X133546000Y-68550000D03*
X135456000Y-68550000D03*
G04 #@! TD*
G04 #@! TO.C,C1*
X102748500Y-81885000D03*
X104658500Y-81885000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,C2*
X153985000Y-96910000D03*
X155735000Y-96910000D03*
G04 #@! TD*
D28*
G04 #@! TO.C,C3*
X156015000Y-90630000D03*
X154105000Y-90630000D03*
G04 #@! TD*
G04 #@! TO.C,C4*
X154105000Y-92535000D03*
X156015000Y-92535000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C5*
X163315000Y-90945000D03*
X163315000Y-92855000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,C6*
X151645000Y-82375000D03*
X153395000Y-82375000D03*
G04 #@! TD*
D28*
G04 #@! TO.C,C7*
X153475000Y-79200000D03*
X151565000Y-79200000D03*
G04 #@! TD*
G04 #@! TO.C,C8*
X153475000Y-77295000D03*
X151565000Y-77295000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C9*
X160775000Y-79520000D03*
X160775000Y-77610000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,C10*
X108465000Y-81105000D03*
X110215000Y-81105000D03*
G04 #@! TD*
D28*
G04 #@! TO.C,C11*
X108385000Y-84280000D03*
X110295000Y-84280000D03*
G04 #@! TD*
G04 #@! TO.C,C12*
X110295000Y-86185000D03*
X108385000Y-86185000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C13*
X173221000Y-83833000D03*
X173221000Y-85743000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,C14*
X175380000Y-76900000D03*
X175380000Y-75150000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C15*
X105276000Y-99967000D03*
X105276000Y-98057000D03*
G04 #@! TD*
D28*
G04 #@! TO.C,C16*
X173424000Y-87473000D03*
X175334000Y-87473000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C17*
X138500000Y-90665000D03*
X138500000Y-92575000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,C18*
X150589600Y-64359000D03*
X150589600Y-62609000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C19*
X138500000Y-82375000D03*
X138500000Y-80465000D03*
G04 #@! TD*
G04 #@! TO.C,C20*
X138500000Y-87575000D03*
X138500000Y-85665000D03*
G04 #@! TD*
D28*
G04 #@! TO.C,C21*
X103706000Y-93061000D03*
X101796000Y-93061000D03*
G04 #@! TD*
G04 #@! TO.C,C22*
X154359000Y-98504000D03*
X156269000Y-98504000D03*
G04 #@! TD*
G04 #@! TO.C,C23*
X105591000Y-91392000D03*
X107501000Y-91392000D03*
G04 #@! TD*
G04 #@! TO.C,C24*
X151189000Y-74882000D03*
X149279000Y-74882000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,C25*
X140900000Y-87095000D03*
X140900000Y-85345000D03*
G04 #@! TD*
G04 #@! TO.C,C26*
X136100000Y-87095000D03*
X136100000Y-85345000D03*
G04 #@! TD*
G04 #@! TO.C,C27*
X136900000Y-92095000D03*
X136900000Y-90345000D03*
G04 #@! TD*
G04 #@! TO.C,C28*
X140100000Y-90345000D03*
X140100000Y-92095000D03*
G04 #@! TD*
G04 #@! TO.C,C29*
X142100000Y-92095000D03*
X142100000Y-90345000D03*
G04 #@! TD*
G04 #@! TO.C,C30*
X134900000Y-90145000D03*
X134900000Y-91895000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,C31*
X135225000Y-88420000D03*
X136975000Y-88420000D03*
G04 #@! TD*
G04 #@! TO.C,C32*
X140025000Y-88420000D03*
X141775000Y-88420000D03*
G04 #@! TD*
G04 #@! TO.C,C33*
X163425000Y-82220000D03*
X165175000Y-82220000D03*
G04 #@! TD*
G04 #@! TO.C,C34*
X158375000Y-82220000D03*
X156625000Y-82220000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,C35*
X177300000Y-94025000D03*
X177300000Y-95775000D03*
G04 #@! TD*
D28*
G04 #@! TO.C,C46*
X145342000Y-103584000D03*
X147252000Y-103584000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,C48*
X103995000Y-70963000D03*
X102245000Y-70963000D03*
G04 #@! TD*
G04 #@! TO.C,C49*
X103372000Y-91156000D03*
X101622000Y-91156000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,C50*
X179713000Y-88856000D03*
X179713000Y-87106000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,C51*
X180473000Y-103856000D03*
X178723000Y-103856000D03*
G04 #@! TD*
G04 #@! TO.C,C52*
X158645000Y-96490000D03*
X160395000Y-96490000D03*
G04 #@! TD*
G04 #@! TO.C,C53*
X132827200Y-86330000D03*
X134577200Y-86330000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C54*
X169172000Y-95281000D03*
X169172000Y-97191000D03*
G04 #@! TD*
G04 #@! TO.C,D11*
X179190000Y-80790000D03*
X179190000Y-78880000D03*
G04 #@! TD*
D32*
G04 #@! TO.C,D10*
X169050000Y-84280000D03*
X171550000Y-84280000D03*
G04 #@! TD*
G04 #@! TO.C,D12*
X169030000Y-78585000D03*
X169030000Y-81085000D03*
G04 #@! TD*
G04 #@! TO.C,D13*
X171550000Y-85804000D03*
X169050000Y-85804000D03*
G04 #@! TD*
G04 #@! TO.C,D14*
X179190000Y-74775000D03*
X179190000Y-77275000D03*
G04 #@! TD*
G04 #@! TO.C,D15*
X177285000Y-77275000D03*
X177285000Y-74775000D03*
G04 #@! TD*
G04 #@! TO.C,D16*
X172987000Y-73503000D03*
X175487000Y-73503000D03*
G04 #@! TD*
G04 #@! TO.C,D17*
X164585000Y-69060000D03*
X164585000Y-71560000D03*
G04 #@! TD*
G04 #@! TO.C,D20*
X168756000Y-68659000D03*
X166256000Y-68659000D03*
G04 #@! TD*
G04 #@! TO.C,D21*
X174979000Y-68550000D03*
X172479000Y-68550000D03*
G04 #@! TD*
G04 #@! TO.C,D23*
X165200000Y-67262000D03*
X162700000Y-67262000D03*
G04 #@! TD*
G04 #@! TO.C,D24*
X162700000Y-65357000D03*
X165200000Y-65357000D03*
G04 #@! TD*
G04 #@! TO.C,D25*
X177412000Y-72594000D03*
X177412000Y-70094000D03*
G04 #@! TD*
G04 #@! TO.C,D26*
X179444000Y-70094000D03*
X179444000Y-72594000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R49*
X113277000Y-74360000D03*
X113277000Y-72610000D03*
G04 #@! TD*
G04 #@! TO.C,R50*
X111372000Y-72610000D03*
X111372000Y-74360000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R51*
X155455000Y-72487000D03*
X157205000Y-72487000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R52*
X171331000Y-66278000D03*
X171331000Y-68028000D03*
G04 #@! TD*
G04 #@! TO.C,R53*
X169919000Y-68028000D03*
X169919000Y-66278000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R54*
X174477000Y-65502000D03*
X172727000Y-65502000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R56*
X128390000Y-106321000D03*
X128390000Y-104571000D03*
G04 #@! TD*
G04 #@! TO.C,R57*
X117722000Y-72483000D03*
X117722000Y-74233000D03*
G04 #@! TD*
G04 #@! TO.C,R58*
X119246000Y-74233000D03*
X119246000Y-72483000D03*
G04 #@! TD*
G04 #@! TO.C,R59*
X120770000Y-72483000D03*
X120770000Y-74233000D03*
G04 #@! TD*
G04 #@! TO.C,R60*
X122294000Y-74233000D03*
X122294000Y-72483000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R61*
X145655000Y-69900000D03*
X143905000Y-69900000D03*
G04 #@! TD*
G04 #@! TO.C,R40*
X166631000Y-65738000D03*
X168381000Y-65738000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R55*
X134740000Y-96740000D03*
X134740000Y-98490000D03*
G04 #@! TD*
D30*
G04 #@! TO.C,C55*
X179078000Y-90963000D03*
X179078000Y-92873000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R65*
X177300000Y-92793000D03*
X177300000Y-91043000D03*
G04 #@! TD*
D33*
G04 #@! TO.C,L1*
X160140000Y-88090000D03*
X157600000Y-88090000D03*
G04 #@! TD*
G04 #@! TO.C,L2*
X103625000Y-88725000D03*
X106165000Y-88725000D03*
G04 #@! TD*
G04 #@! TO.C,L3*
X155060000Y-74755000D03*
X157600000Y-74755000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R1*
X171175000Y-82375000D03*
X169425000Y-82375000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R2*
X172840000Y-78960000D03*
X172840000Y-80710000D03*
G04 #@! TD*
G04 #@! TO.C,R3*
X162045000Y-71185000D03*
X162045000Y-69435000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R4*
X176890000Y-80470000D03*
X175140000Y-80470000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R5*
X174110000Y-75150000D03*
X174110000Y-76900000D03*
G04 #@! TD*
G04 #@! TO.C,R6*
X178555000Y-85790000D03*
X178555000Y-84040000D03*
G04 #@! TD*
G04 #@! TO.C,R7*
X113785000Y-85155000D03*
X113785000Y-83405000D03*
G04 #@! TD*
G04 #@! TO.C,R8*
X170935000Y-80710000D03*
X170935000Y-78960000D03*
G04 #@! TD*
G04 #@! TO.C,R9*
X128390000Y-110555000D03*
X128390000Y-108805000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R10*
X151264000Y-103076000D03*
X153014000Y-103076000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R11*
X119515000Y-80093000D03*
X119515000Y-78343000D03*
G04 #@! TD*
G04 #@! TO.C,R12*
X114308000Y-89219000D03*
X114308000Y-87469000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R13*
X175140000Y-78565000D03*
X176890000Y-78565000D03*
G04 #@! TD*
G04 #@! TO.C,R14*
X124721000Y-85060000D03*
X126471000Y-85060000D03*
G04 #@! TD*
G04 #@! TO.C,R15*
X126471000Y-83536000D03*
X124721000Y-83536000D03*
G04 #@! TD*
G04 #@! TO.C,R16*
X124721000Y-82012000D03*
X126471000Y-82012000D03*
G04 #@! TD*
G04 #@! TO.C,R17*
X126471000Y-80470000D03*
X124721000Y-80470000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R18*
X130422000Y-73898000D03*
X130422000Y-75648000D03*
G04 #@! TD*
G04 #@! TO.C,R19*
X131961000Y-73898000D03*
X131961000Y-75648000D03*
G04 #@! TD*
G04 #@! TO.C,R20*
X133485000Y-73898000D03*
X133485000Y-75648000D03*
G04 #@! TD*
G04 #@! TO.C,R21*
X135009000Y-75648000D03*
X135009000Y-73898000D03*
G04 #@! TD*
G04 #@! TO.C,R22*
X140025500Y-66105000D03*
X140025500Y-64355000D03*
G04 #@! TD*
G04 #@! TO.C,R23*
X140597000Y-71076000D03*
X140597000Y-69326000D03*
G04 #@! TD*
G04 #@! TO.C,R24*
X150615000Y-67647000D03*
X150615000Y-65897000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R25*
X148300000Y-72487000D03*
X150050000Y-72487000D03*
G04 #@! TD*
G04 #@! TO.C,R26*
X150362000Y-69693000D03*
X148612000Y-69693000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R27*
X129025000Y-95300000D03*
X129025000Y-97050000D03*
G04 #@! TD*
G04 #@! TO.C,R28*
X117595000Y-78343000D03*
X117595000Y-80093000D03*
G04 #@! TD*
G04 #@! TO.C,R29*
X112784000Y-89219000D03*
X112784000Y-87469000D03*
G04 #@! TD*
G04 #@! TO.C,R30*
X115690000Y-78343000D03*
X115690000Y-80093000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R31*
X142755000Y-98250000D03*
X144505000Y-98250000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R32*
X132835000Y-98490000D03*
X132835000Y-96740000D03*
G04 #@! TD*
G04 #@! TO.C,R33*
X130930000Y-96740000D03*
X130930000Y-98490000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R34*
X102115000Y-103600000D03*
X103865000Y-103600000D03*
G04 #@! TD*
G04 #@! TO.C,R35*
X102115000Y-102060000D03*
X103865000Y-102060000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,R38*
X103576500Y-99905000D03*
X103576500Y-98155000D03*
G04 #@! TD*
D29*
G04 #@! TO.C,R39*
X164190000Y-96345000D03*
X162440000Y-96345000D03*
G04 #@! TD*
G04 #@! TO.C,R63*
X168381000Y-67135000D03*
X166631000Y-67135000D03*
G04 #@! TD*
G04 #@! TO.C,R64*
X174475000Y-66899000D03*
X172725000Y-66899000D03*
G04 #@! TD*
G04 #@! TO.C,RA1*
X153985000Y-95640000D03*
X155735000Y-95640000D03*
G04 #@! TD*
G04 #@! TO.C,RA2*
X110215000Y-82375000D03*
X108465000Y-82375000D03*
G04 #@! TD*
G04 #@! TO.C,RA3*
X151645000Y-81105000D03*
X153395000Y-81105000D03*
G04 #@! TD*
D31*
G04 #@! TO.C,RB1*
X158235000Y-92775000D03*
X158235000Y-91025000D03*
G04 #@! TD*
G04 #@! TO.C,RB2*
X106165000Y-85790000D03*
X106165000Y-84040000D03*
G04 #@! TD*
G04 #@! TO.C,RB3*
X155695000Y-79440000D03*
X155695000Y-77690000D03*
G04 #@! TD*
D13*
G04 #@! TO.C,D8*
X110149000Y-70074000D03*
X114149000Y-70074000D03*
G04 #@! TD*
D34*
G04 #@! TO.C,Q1*
X176015000Y-83280000D03*
X175065000Y-85280000D03*
X176965000Y-85280000D03*
G04 #@! TD*
D35*
G04 #@! TO.C,Q2*
X171935000Y-75075000D03*
X171935000Y-76975000D03*
X169935000Y-76025000D03*
G04 #@! TD*
D32*
G04 #@! TO.C,D27*
X175502000Y-72106000D03*
X173002000Y-72106000D03*
G04 #@! TD*
D36*
G04 #@! TO.C,R66*
X173198000Y-70201000D03*
X174798000Y-70201000D03*
G04 #@! TD*
D37*
G04 #@! TO.C,C56*
X179078000Y-96274000D03*
X179078000Y-94674000D03*
G04 #@! TD*
D36*
G04 #@! TO.C,C57*
X177084000Y-103856000D03*
X175484000Y-103856000D03*
G04 #@! TD*
D38*
G04 #@! TO.C,C58*
X167902000Y-89242000D03*
X167902000Y-87482000D03*
G04 #@! TD*
D37*
G04 #@! TO.C,C59*
X166251000Y-89162000D03*
X166251000Y-87562000D03*
G04 #@! TD*
D14*
G04 #@! TO.C,L4*
X169807000Y-87394500D03*
X169807000Y-89329500D03*
G04 #@! TD*
G04 #@! TO.C,RP1*
X152281000Y-98328500D03*
X152281000Y-96393500D03*
G04 #@! TD*
G04 #@! TO.C,RP3*
X149472000Y-77343500D03*
X149472000Y-79278500D03*
G04 #@! TD*
M02*